TY - JOUR
T1 - Evaluation of defect density by top-view large scale AFM on metamorphic structures grown by MOVPE
AU - Gocalinska, Agnieszka
AU - Manganaro, Marina
AU - Dimastrodonato, Valeria
AU - Pelucchi, Emanuele
N1 - Publisher Copyright:
© 2015 Elsevier B.V. All rights reserved.
PY - 2015/9/15
Y1 - 2015/9/15
N2 - We demonstrate an atomic force microscopy based method for estimation of defect density by identification of threading dislocations on a non-flat surface resulting from metamorphic growth. The discussed technique can be applied as an everyday evaluation tool for the quality of epitaxial structures and allow for cost reduction, as it lessens the amount of the transmission electron microscopy analysis required at the early stages of projects. Metamorphic structures with low surface defectivities (below 10 6 ) were developed successfully with the application of the technique, proving its usefulness in process optimisation.
AB - We demonstrate an atomic force microscopy based method for estimation of defect density by identification of threading dislocations on a non-flat surface resulting from metamorphic growth. The discussed technique can be applied as an everyday evaluation tool for the quality of epitaxial structures and allow for cost reduction, as it lessens the amount of the transmission electron microscopy analysis required at the early stages of projects. Metamorphic structures with low surface defectivities (below 10 6 ) were developed successfully with the application of the technique, proving its usefulness in process optimisation.
KW - Arsenates
KW - Atomic force microscopy
KW - Defects
KW - Metalorganic vapor phase epitaxy
KW - Semiconducting III-V materials
UR - https://www.scopus.com/pages/publications/84937676060
U2 - 10.1016/j.apsusc.2015.05.070
DO - 10.1016/j.apsusc.2015.05.070
M3 - Article
AN - SCOPUS:84937676060
SN - 0169-4332
VL - 349
SP - 849
EP - 854
JO - Applied Surface Science
JF - Applied Surface Science
ER -