Evaluation of defect density by top-view large scale AFM on metamorphic structures grown by MOVPE

Engineering

• Atomic Force Microscopy 50%
• Cost Reduction 50%
• Defect Density 100%
• Defectivity 50%
• Early Stage 50%
• Flat Surface 50%
• Threading Dislocation 50%

Material Science

• Atomic Force Microscopy 50%
• Defect Density 100%
• Electron Microscopy 50%
• Surface (Surface Science) 100%
• Transmission Electron Microscopy 50%