TY - GEN
T1 - Evaluation of spring constant in plates with straight suspensions
AU - Lishchynska, Maryna
AU - Cordero, Nicolas
AU - Slattery, Orla
AU - O'Mahony, Conor
PY - 2005
Y1 - 2005
N2 - The mechanical spring constant is one of the most important characteristics of micromechanical structures, providing a key tool for accurate behavioural modelling of the devices. It is also one of the main controllable parameters allowing maximum flexibility for the designer. A study of the spring constant of elastically suspended plates, common to MEMS tunable capacitors and RF switches, is carried out in this paper. A model for the spring constant of the plate suspended by four cantilevers incorporating residual stress is presented. The model also accounts for non-ideal anchors. The model was extracted from FEM simulation data and validated experimentally. Correlation to within 3 % was achieved. The model can be used for design, analysis and optimisation of tunable capacitors and radio frequency switches or other structures based on elastically suspended plates. The presented model also predicts that significant errors may result in predicting the spring constant when combined effects of residual stress, non-ideal anchors and non-rigidity of the plate are neglected or underestimated.
AB - The mechanical spring constant is one of the most important characteristics of micromechanical structures, providing a key tool for accurate behavioural modelling of the devices. It is also one of the main controllable parameters allowing maximum flexibility for the designer. A study of the spring constant of elastically suspended plates, common to MEMS tunable capacitors and RF switches, is carried out in this paper. A model for the spring constant of the plate suspended by four cantilevers incorporating residual stress is presented. The model also accounts for non-ideal anchors. The model was extracted from FEM simulation data and validated experimentally. Correlation to within 3 % was achieved. The model can be used for design, analysis and optimisation of tunable capacitors and radio frequency switches or other structures based on elastically suspended plates. The presented model also predicts that significant errors may result in predicting the spring constant when combined effects of residual stress, non-ideal anchors and non-rigidity of the plate are neglected or underestimated.
UR - https://www.scopus.com/pages/publications/33745726143
U2 - 10.1109/ESIME.2005.1502812
DO - 10.1109/ESIME.2005.1502812
M3 - Conference proceeding
AN - SCOPUS:33745726143
SN - 0780390628
SN - 9780780390621
T3 - Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005
SP - 263
EP - 268
BT - Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005
T2 - 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005
Y2 - 18 April 2005 through 20 April 2005
ER -