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Experimental, analytical, and finite element analyses of nanoindentation of multilayer PZT/Pt/SiO2 thin film systems on silicon wafers

  • C. Chima-Okereke
  • , A. J. Bushby
  • , M. J. Reece
  • , R. W. Whatmore
  • , Q. Zhang

Research output: Other output › peer-review

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