Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches

Z. Olszewski; R. Houlihan; C. Ryan; C. O'Mahony; R. Duane

doi:10.1063/1.4726116

Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches

Z. Olszewski
, R. Houlihan
, C. Ryan
, C. O'Mahony
, R. Duane

University College Cork

Research output: Contribution to journal › Article › peer-review

Abstract

DC and bipolar voltage stresses are used to isolate mechanical degradation of the movable electrode from charging mechanism in microelectromechanical capacitive switches. Switches with different metals as the movable electrode were investigated. In titanium switches, a shift in the pull-in voltages is observed after dc stressing whereas no shift occurs after the bipolar stressing, which is to be expected from charging theory. On switches with similar dielectric but made of aluminium, the narrowing effect occurs regardless if dc or bipolar stressing is used, which indicates the mechanical degradation as the mechanism responsible.

Original language	English
Article number	233505
Journal	Applied Physics Letters
Volume	100
Issue number	23
DOIs	https://doi.org/10.1063/1.4726116
Publication status	Published - 4 Jun 2012

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10.1063/1.4726116

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@article{c0e2d5ccd724459fac6753dd2b79259b,

title = "Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches",

abstract = "DC and bipolar voltage stresses are used to isolate mechanical degradation of the movable electrode from charging mechanism in microelectromechanical capacitive switches. Switches with different metals as the movable electrode were investigated. In titanium switches, a shift in the pull-in voltages is observed after dc stressing whereas no shift occurs after the bipolar stressing, which is to be expected from charging theory. On switches with similar dielectric but made of aluminium, the narrowing effect occurs regardless if dc or bipolar stressing is used, which indicates the mechanical degradation as the mechanism responsible.",

author = "Z. Olszewski and R. Houlihan and C. Ryan and C. O'Mahony and R. Duane",

year = "2012",

month = jun,

day = "4",

doi = "10.1063/1.4726116",

language = "English",

volume = "100",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "23",

}

TY - JOUR

T1 - Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches

AU - Olszewski, Z.

AU - Houlihan, R.

AU - Ryan, C.

AU - O'Mahony, C.

AU - Duane, R.

PY - 2012/6/4

Y1 - 2012/6/4

N2 - DC and bipolar voltage stresses are used to isolate mechanical degradation of the movable electrode from charging mechanism in microelectromechanical capacitive switches. Switches with different metals as the movable electrode were investigated. In titanium switches, a shift in the pull-in voltages is observed after dc stressing whereas no shift occurs after the bipolar stressing, which is to be expected from charging theory. On switches with similar dielectric but made of aluminium, the narrowing effect occurs regardless if dc or bipolar stressing is used, which indicates the mechanical degradation as the mechanism responsible.

AB - DC and bipolar voltage stresses are used to isolate mechanical degradation of the movable electrode from charging mechanism in microelectromechanical capacitive switches. Switches with different metals as the movable electrode were investigated. In titanium switches, a shift in the pull-in voltages is observed after dc stressing whereas no shift occurs after the bipolar stressing, which is to be expected from charging theory. On switches with similar dielectric but made of aluminium, the narrowing effect occurs regardless if dc or bipolar stressing is used, which indicates the mechanical degradation as the mechanism responsible.

UR - https://www.scopus.com/pages/publications/84862138605

U2 - 10.1063/1.4726116

DO - 10.1063/1.4726116

M3 - Article

AN - SCOPUS:84862138605

SN - 0003-6951

VL - 100

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 23

M1 - 233505

ER -

Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches

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