Extraction of the refractive index profile of thin transparent conductive oxide films from the analysis of reflectance optical spectra

In the direction of growth of fabricated films, the material near the free surface as well as the interface with the substrate exhibits properties which are different from those of the material in the bulk. The resulting spatial inhomogeneity of the refractive index influences positions and values of the extrema of optical spectra. We exploit this to derive the profile of the refractive index by developing a theoretical approach. In the calculations, taking the derived profile into account, we attain a good reproduction of the experimental Transmittance and Reflectance spectra from approximately 1 to 4 eV, the region of relatively weak refractive-index dispersion.