Fabrication and characterization of single-crystal metal-assisted chemically etched rough Si nanowires for lithium-ion battery anodes

W. McSweeney; O. Lotty; J. D. Holmes; C. O'Dwyer

doi:10.1149/1.3654199

Fabrication and characterization of single-crystal metal-assisted chemically etched rough Si nanowires for lithium-ion battery anodes

W. McSweeney
, O. Lotty
, J. D. Holmes
, C. O'Dwyer

School of Chemistry

University of Limerick
Trinity College Dublin

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

Abstract

Silicon nanowires were fabricated by a metal assisted chemical (MAC) etching process and routes toward ohmic contacting of substrates for Li-ion battery anode application were developed. Si nanowire layers are comprised of wires that are single crystal with rough outer surfaces. The nanowires are epitaxial with the underlying Si(100) substrate, maintain equivalent doping density and crystal orientation, and are coated with a stoichiometric SiO ₂. Electrical backside contacting using an In-Ga eutectic allows low-resistance ohmic contacts to low-doped nanowire electrodes for electrochemical testing.

Original language	English
Title of host publication	Nanostructured Materials for Energy Storage and Conversion
Pages	25-34
Number of pages	10
Edition	34
DOIs	https://doi.org/10.1149/1.3654199
Publication status	Published - 2011
Event	Nanostructured Materials for Energy Storage and Conversion - 219th ECS Meeting - Montreal, QC, Canada Duration: 1 May 2011 → 6 May 2011

Publication series

Name	ECS Transactions
Number	34
Volume	35
ISSN (Print)	1938-5862
ISSN (Electronic)	1938-6737

Conference

Conference	Nanostructured Materials for Energy Storage and Conversion - 219th ECS Meeting
Country/Territory	Canada
City	Montreal, QC
Period	1/05/11 → 6/05/11

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

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10.1149/1.3654199

Cite this

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title = "Fabrication and characterization of single-crystal metal-assisted chemically etched rough Si nanowires for lithium-ion battery anodes",

abstract = "Silicon nanowires were fabricated by a metal assisted chemical (MAC) etching process and routes toward ohmic contacting of substrates for Li-ion battery anode application were developed. Si nanowire layers are comprised of wires that are single crystal with rough outer surfaces. The nanowires are epitaxial with the underlying Si(100) substrate, maintain equivalent doping density and crystal orientation, and are coated with a stoichiometric SiO 2. Electrical backside contacting using an In-Ga eutectic allows low-resistance ohmic contacts to low-doped nanowire electrodes for electrochemical testing.",

author = "W. McSweeney and O. Lotty and Holmes, \{J. D.\} and C. O'Dwyer",

year = "2011",

doi = "10.1149/1.3654199",

language = "English",

isbn = "9781607682943",

series = "ECS Transactions",

number = "34",

pages = "25--34",

booktitle = "Nanostructured Materials for Energy Storage and Conversion",

edition = "34",

note = "Nanostructured Materials for Energy Storage and Conversion - 219th ECS Meeting ; Conference date: 01-05-2011 Through 06-05-2011",

}

McSweeney, W, Lotty, O, Holmes, JD & O'Dwyer, C 2011, Fabrication and characterization of single-crystal metal-assisted chemically etched rough Si nanowires for lithium-ion battery anodes. in Nanostructured Materials for Energy Storage and Conversion. 34 edn, ECS Transactions, no. 34, vol. 35, pp. 25-34, Nanostructured Materials for Energy Storage and Conversion - 219th ECS Meeting, Montreal, QC, Canada, 1/05/11. https://doi.org/10.1149/1.3654199

Fabrication and characterization of single-crystal metal-assisted chemically etched rough Si nanowires for lithium-ion battery anodes. / McSweeney, W.; Lotty, O.; Holmes, J. D. et al.
Nanostructured Materials for Energy Storage and Conversion. 34. ed. 2011. p. 25-34 (ECS Transactions; Vol. 35, No. 34).

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

TY - GEN

T1 - Fabrication and characterization of single-crystal metal-assisted chemically etched rough Si nanowires for lithium-ion battery anodes

AU - McSweeney, W.

AU - Lotty, O.

AU - Holmes, J. D.

AU - O'Dwyer, C.

PY - 2011

Y1 - 2011

N2 - Silicon nanowires were fabricated by a metal assisted chemical (MAC) etching process and routes toward ohmic contacting of substrates for Li-ion battery anode application were developed. Si nanowire layers are comprised of wires that are single crystal with rough outer surfaces. The nanowires are epitaxial with the underlying Si(100) substrate, maintain equivalent doping density and crystal orientation, and are coated with a stoichiometric SiO 2. Electrical backside contacting using an In-Ga eutectic allows low-resistance ohmic contacts to low-doped nanowire electrodes for electrochemical testing.

AB - Silicon nanowires were fabricated by a metal assisted chemical (MAC) etching process and routes toward ohmic contacting of substrates for Li-ion battery anode application were developed. Si nanowire layers are comprised of wires that are single crystal with rough outer surfaces. The nanowires are epitaxial with the underlying Si(100) substrate, maintain equivalent doping density and crystal orientation, and are coated with a stoichiometric SiO 2. Electrical backside contacting using an In-Ga eutectic allows low-resistance ohmic contacts to low-doped nanowire electrodes for electrochemical testing.

UR - https://www.scopus.com/pages/publications/84869021259

U2 - 10.1149/1.3654199

DO - 10.1149/1.3654199

M3 - Conference proceeding

AN - SCOPUS:84869021259

SN - 9781607682943

T3 - ECS Transactions

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BT - Nanostructured Materials for Energy Storage and Conversion

T2 - Nanostructured Materials for Energy Storage and Conversion - 219th ECS Meeting

Y2 - 1 May 2011 through 6 May 2011

ER -

Fabrication and characterization of single-crystal metal-assisted chemically etched rough Si nanowires for lithium-ion battery anodes

Abstract

Publication series

Conference

UN SDGs

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