TY - JOUR
T1 - Fabrication and modeling of high-frequency PZT composite thick film membrane resonators
AU - Duval, Fabrice F.C.
AU - Dorey, Robert A.
AU - Wright, Robert W.
AU - Huang, Zhaorong
AU - Whatmore, Roger W.
PY - 2004/10
Y1 - 2004/10
N2 - High-frequency, thickness mode resonators were fabricated using a 7 μm piezoelectric transducer (PZT) thick film that was produced using a modified composite ceramic sol-gel process. Initial studies dealt with the integration of the PZT thick film onto the substrate. Zirconium oxide (ZrO2) was selected as a diffusion barrier layer and gave good results when used in conjunction with silicon oxide (SiO2) as an etch stop layer. Using these conditions, devices were produced and the acoustic properties measured and modeled. The resonators showed a resonant frequency of about 200 MHz, an effective electromechanical coupling coefficient of 0.34, and a Q factor of 22. Modeling was based on a Mason-type model that gave good agreement between the experimental data and the simulations. The latter showed, for the PZT thick film, an electromechanical coupling coefficient of 0.35, a stiffness of 8.65* 1010 N.m-2 and an e33,f piezoelectric coefficient of 9 C.m-2.
AB - High-frequency, thickness mode resonators were fabricated using a 7 μm piezoelectric transducer (PZT) thick film that was produced using a modified composite ceramic sol-gel process. Initial studies dealt with the integration of the PZT thick film onto the substrate. Zirconium oxide (ZrO2) was selected as a diffusion barrier layer and gave good results when used in conjunction with silicon oxide (SiO2) as an etch stop layer. Using these conditions, devices were produced and the acoustic properties measured and modeled. The resonators showed a resonant frequency of about 200 MHz, an effective electromechanical coupling coefficient of 0.34, and a Q factor of 22. Modeling was based on a Mason-type model that gave good agreement between the experimental data and the simulations. The latter showed, for the PZT thick film, an electromechanical coupling coefficient of 0.35, a stiffness of 8.65* 1010 N.m-2 and an e33,f piezoelectric coefficient of 9 C.m-2.
UR - https://www.scopus.com/pages/publications/8344260658
U2 - 10.1109/TUFFC.2004.1350953
DO - 10.1109/TUFFC.2004.1350953
M3 - Article
AN - SCOPUS:8344260658
SN - 0885-3010
VL - 51
SP - 1255
EP - 1261
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
IS - 10
ER -