@inbook{4ba514bf84734d3eadda83cb7a42d209,
title = "Fabrication and some measurement of a digital variable optical attenuator",
abstract = "Arrays of sixteen micromirrors featuring 1 μm-wide structures have been fabricated based on SOI technology. Assembled prototypes can be actuated at about 70 V. Tilt angles, surface flatness, and some optical data of certain mirrors are measured.",
keywords = "Assembly, Attenuation measurement, Electrodes, Mirrors, Optical attenuators, Optical device fabrication, Optical fiber networks, Optical sensors, Power amplifiers, Stimulated emission",
author = "W. Sun and Munghal, \{M. J.\} and W. Noell and F. Perez and Riza, \{N. A.\} and \{De Rooij\}, N.",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 2003 IEEE/LEOS International Conference on Optical MEMS ; Conference date: 18-08-2003 Through 21-08-2003",
year = "2003",
doi = "10.1109/OMEMS.2003.1233493",
language = "English",
series = "2003 IEEE/LEOS International Conference on Optical MEMS",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "115--116",
booktitle = "2003 IEEE/LEOS International Conference on Optical MEMS",
address = "United States",
}