TY - CHAP
T1 - Fabrication and test of integrated micro-scale vibration based electromagnetic generator
AU - Kulkarni, Santosh
AU - Koukharenko, Elena
AU - Tudor, John
AU - Beeby, Steve
AU - O'Donnell, Terence
AU - Roy, Saibal
PY - 2007
Y1 - 2007
N2 - This paper discusses the design, fabrication and testing of electromagnetic microgenerators on silicon. Two different designs of power generators are micro-fabricated, Prototype A having a wire-wound copper coil and Prototype B, an electrodeposited copper coil both on a Deep Reactive Ion etched (DRIE) silicon paddle. The devices were fabricated using standard Micro-Electro- Mechanical Systems (MEMS) processing techniques. For Prototype A, the maximum measured power output was 148 nW at 8.08 kHz resonant frequency and 3.9 m/s 2 acceleration. For prototype B, the microgenerator gave a maximum load power of 23 nW for an acceleration of 9.8 m/s2, at a resonant frequency of 9.83 kHz.
AB - This paper discusses the design, fabrication and testing of electromagnetic microgenerators on silicon. Two different designs of power generators are micro-fabricated, Prototype A having a wire-wound copper coil and Prototype B, an electrodeposited copper coil both on a Deep Reactive Ion etched (DRIE) silicon paddle. The devices were fabricated using standard Micro-Electro- Mechanical Systems (MEMS) processing techniques. For Prototype A, the maximum measured power output was 148 nW at 8.08 kHz resonant frequency and 3.9 m/s 2 acceleration. For prototype B, the microgenerator gave a maximum load power of 23 nW for an acceleration of 9.8 m/s2, at a resonant frequency of 9.83 kHz.
KW - Energy harvesting from vibrations
KW - MEMS fabrication techniques
KW - Micro-fabricated electromagnetic power generator
UR - https://www.scopus.com/pages/publications/50049134007
U2 - 10.1109/SENSOR.2007.4300271
DO - 10.1109/SENSOR.2007.4300271
M3 - Chapter
AN - SCOPUS:50049134007
SN - 1424408423
SN - 9781424408429
T3 - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 879
EP - 882
BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Y2 - 10 June 2007 through 14 June 2007
ER -