Fabrication of a silicon-based superfluid oscillator

Keith Schwab; J. Steinhauer; J. C. Davis; Richard E. Packard

doi:10.1109/84.536624

Fabrication of a silicon-based superfluid oscillator

Keith Schwab
, J. Steinhauer
, J. C. Davis
, Richard E. Packard

University of California at Berkeley
The University of Chicago
California Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

We have constructed an integrated superfluid oscillator using various silicon processing techniques, including micromachining and electron beam lithography. This device has the advantage of a very small internal volume (0.72 mm³). This makes it insensitive to spurious external acoustic noise which has limited the performance of larger experiments. We have tested the performance of this device in two configurations, one with a single micro-aperture and another with an additional fine tube. Both configurations demonstrate macroscopic quantum phenomena in superfluid ⁴He at low temperatures (0.25 K < T < 2.2 K) and have been used to study these effects in detail.

Original language	English
Pages (from-to)	180-186
Number of pages	7
Journal	Journal of Microelectromechanical Systems
Volume	5
Issue number	3
DOIs	https://doi.org/10.1109/84.536624
Publication status	Published - Sep 1996
Externally published	Yes

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SDG 9 Industry, Innovation, and Infrastructure

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10.1109/84.536624

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abstract = "We have constructed an integrated superfluid oscillator using various silicon processing techniques, including micromachining and electron beam lithography. This device has the advantage of a very small internal volume (0.72 mm3). This makes it insensitive to spurious external acoustic noise which has limited the performance of larger experiments. We have tested the performance of this device in two configurations, one with a single micro-aperture and another with an additional fine tube. Both configurations demonstrate macroscopic quantum phenomena in superfluid 4He at low temperatures (0.25 K < T < 2.2 K) and have been used to study these effects in detail.",

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AU - Steinhauer, J.

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AU - Packard, Richard E.

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AB - We have constructed an integrated superfluid oscillator using various silicon processing techniques, including micromachining and electron beam lithography. This device has the advantage of a very small internal volume (0.72 mm3). This makes it insensitive to spurious external acoustic noise which has limited the performance of larger experiments. We have tested the performance of this device in two configurations, one with a single micro-aperture and another with an additional fine tube. Both configurations demonstrate macroscopic quantum phenomena in superfluid 4He at low temperatures (0.25 K < T < 2.2 K) and have been used to study these effects in detail.

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Fabrication of a silicon-based superfluid oscillator

Abstract

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