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Fabrication of long wavelength microresonators
B. Corbett
, L. Considine
, S. Walsh
,
J. Justice
, W. M. Kelly
, Lee Maltings
Natl Microelectronics Research Cent
Research output
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Contribution to conference
›
Paper
›
peer-review
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Material Science
Quantum Well
100%
Silicon
50%
Wet Etching
50%
Dry Etching
50%
Silicon Dioxide
50%
Epilayers
50%
Surface Damage
50%