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Fabrication of micro-thermoelectric cooler for the thermal management of photonic devices

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Abstract

The work demonstrates and discusses the fabrication of micro thermoelectric cooler (μ -TEC) for thermal management of photonic devices. The device is fabricated using cost-effective electrodeposition technique on silicon wafer with 210 pairs of the electrodeposited p-type BiSbTe and n-type BiTe pillars. The complete device is fabricated using flip-chip bonding technique. We discuss the challenges in device fabrication and solutions employed to successfully construct the device.

Original languageEnglish
Title of host publication18th International Conference on Nanotechnology, NANO 2018
PublisherIEEE Computer Society
ISBN (Electronic)9781538653364
DOIs
Publication statusPublished - 2 Jul 2018
Event18th International Conference on Nanotechnology, NANO 2018 - Cork, Ireland
Duration: 23 Jul 201826 Jul 2018

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
Volume2018-July
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380

Conference

Conference18th International Conference on Nanotechnology, NANO 2018
Country/TerritoryIreland
CityCork
Period23/07/1826/07/18

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