TY - GEN
T1 - Fabrication of micro-thermoelectric cooler for the thermal management of photonic devices
AU - Lal, Swatchith
AU - Gautam, Devendraprakash
AU - Razeeb, Kafil M.
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/7/2
Y1 - 2018/7/2
N2 - The work demonstrates and discusses the fabrication of micro thermoelectric cooler (μ -TEC) for thermal management of photonic devices. The device is fabricated using cost-effective electrodeposition technique on silicon wafer with 210 pairs of the electrodeposited p-type BiSbTe and n-type BiTe pillars. The complete device is fabricated using flip-chip bonding technique. We discuss the challenges in device fabrication and solutions employed to successfully construct the device.
AB - The work demonstrates and discusses the fabrication of micro thermoelectric cooler (μ -TEC) for thermal management of photonic devices. The device is fabricated using cost-effective electrodeposition technique on silicon wafer with 210 pairs of the electrodeposited p-type BiSbTe and n-type BiTe pillars. The complete device is fabricated using flip-chip bonding technique. We discuss the challenges in device fabrication and solutions employed to successfully construct the device.
UR - https://www.scopus.com/pages/publications/85062267696
U2 - 10.1109/NANO.2018.8626304
DO - 10.1109/NANO.2018.8626304
M3 - Conference proceeding
AN - SCOPUS:85062267696
T3 - Proceedings of the IEEE Conference on Nanotechnology
BT - 18th International Conference on Nanotechnology, NANO 2018
PB - IEEE Computer Society
T2 - 18th International Conference on Nanotechnology, NANO 2018
Y2 - 23 July 2018 through 26 July 2018
ER -