Fabrication of PZT composite thick films for high frequency membrane resonators

Engineering

• Silicon Oxide 100%
• Resonator 100%
• Electrode Size 100%
• Barrier Layer 50%
• Q Factor 50%
• Nitride 50%
• Silicon Substrate 50%
• Insertion Loss 50%
• Sol-Gel Process 50%
• Coupling Coefficient 50%
• Resonant Frequency 50%
• Good Result 50%
• Diffusion Barrier 50%
• Mechanical Coupling 50%

Material Science

• Silicon 100%
• Thick Films 100%
• Composite Material 100%
• Resonator 100%
• Oxide Compound 66%
• Zirconia 66%
• Titanium Oxide 33%
• Sol-Gel 33%
• Silicon Nitride 33%
• Electromechanical Coupling 33%
• Acoustic Property 33%
• Ceramic Composite 33%