Failure analysis of advanced packaging technologies using scanning acoustic microscopy

Research output: Contribution to journalArticlepeer-review

Abstract

In recent years, scanning acoustic microscopy(SAM) has been found to be a very successful technique when used in the microelectronics industry to evaluate, from a reliability perspective, standard plastic packaging technologies such as PQFP's, PLCC's, DIP's and SOP's.[1,2] The recent explosion of advanced packaging techniques such as Chip-on-Board, Flip-chip and BGA and the proliferation of Microsystems has further widened the arena of what constitutes microelectronics. With such a wide breadth of devices from standard plastic packages to state-of-the-art microsystems, it is difficult to find a failure analysis technique which can cope competently with that scope. SAM is one such technique[3,4,5]. This paper will demonstrate the effectiveness of SAM at non-destructively analysing a range of advanced packaging technologies from integrated passives to flip-chip to microsystems.

Original languageEnglish
Pages (from-to)31-40
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4406
DOIs
Publication statusPublished - 2001
EventIn-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing II - Edinburgh, United Kingdom
Duration: 31 May 20011 Jun 2001

Keywords

  • Flip-chip
  • Integrated passives
  • LTCC
  • Microsystems
  • Scanning acoustic microscopy
  • Underfill

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