Failure analysis of large area pt/hfo 2/pt capacitors using multilayer perceptrons

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

Original language	Undefined/Unknown
Title of host publication	2021 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
Publication status	Published - 2021

Cite this

@inproceedings{e8cedc5dd0cf427e9540ed1f8dc659ee,

title = "Failure analysis of large area pt/hfo 2/pt capacitors using multilayer perceptrons",

author = "J Mu{\~n}oz-Gorriz and Scott Monaghan and Karim Cherkaoui and Jordi Su{\~n}{\'e} and Hurley, \{Paul K\} and Enrique Miranda",

year = "2021",

language = "Undefined/Unknown",

booktitle = "2021 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)",

}

TY - GEN

T1 - Failure analysis of large area pt/hfo 2/pt capacitors using multilayer perceptrons

AU - Muñoz-Gorriz, J

AU - Monaghan, Scott

AU - Cherkaoui, Karim

AU - Suñé, Jordi

AU - Hurley, Paul K

AU - Miranda, Enrique

PY - 2021

Y1 - 2021

M3 - Conference proceeding

BT - 2021 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

ER -