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Failure Analysis of Large Area Pt/HfO<sub>2</sub>/Pt Capacitors Using Multilayer Perceptrons

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Original languageEnglish
Title of host publication2021 Ieee International Symposium On The Physical And Failure Analysis Of Integrated Circuits (ipfa)
Number of pages5
DOIs
Publication statusPublished - 2021

Keywords

  • Mim
  • Dielectric breakdown
  • Neural networks
  • Perceptron
  • Reliability
  • Spatial statistics

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