FEM simulation analysis of TiO2/ZnO/SiO2/Si multilayer structure for CMOS compatible acousto-optic tunable filter

Mehwish Hanif; V. Jeoti; M. Z. Aslam

doi:10.1088/1742-6596/1529/5/052039

FEM simulation analysis of TiO₂/ZnO/SiO₂/Si multilayer structure for CMOS compatible acousto-optic tunable filter

Mehwish Hanif
, V. Jeoti
, M. Z. Aslam

Universiti Teknologi Petronas

Research output: Contribution to journal › Article › peer-review

Abstract

In this paper, TiO₂/ZnO/SiO₂/Si layer structures with different thickness of ZnO and TiO₂ is discussed and explained. The study is carried out in order to obtain optimal normalized thickness of the multilayer structure for fabricating acousto-optic tunable filter with high figure of merit (FOM). Based on simulation and study of SAW propagation characteristics like, electromechanical coupling co-efficient, figure of merit and phase velocity, it is inferred that this structure is suitable for the desired application.

Original language	English
Article number	052039
Journal	Journal of Physics: Conference Series
Volume	1529
Issue number	5
DOIs	https://doi.org/10.1088/1742-6596/1529/5/052039
Publication status	Published - 17 Jun 2020
Externally published	Yes
Event	2nd Joint International Conference on Emerging Computing Technology and Sports, JICETS 2019 - Bandung, Indonesia Duration: 25 Nov 2019 → 27 Nov 2019

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title = "FEM simulation analysis of TiO2/ZnO/SiO2/Si multilayer structure for CMOS compatible acousto-optic tunable filter",

abstract = "In this paper, TiO2/ZnO/SiO2/Si layer structures with different thickness of ZnO and TiO2 is discussed and explained. The study is carried out in order to obtain optimal normalized thickness of the multilayer structure for fabricating acousto-optic tunable filter with high figure of merit (FOM). Based on simulation and study of SAW propagation characteristics like, electromechanical coupling co-efficient, figure of merit and phase velocity, it is inferred that this structure is suitable for the desired application.",

author = "Mehwish Hanif and V. Jeoti and Aslam, \{M. Z.\}",

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AU - Hanif, Mehwish

AU - Jeoti, V.

AU - Aslam, M. Z.

PY - 2020/6/17

Y1 - 2020/6/17

N2 - In this paper, TiO2/ZnO/SiO2/Si layer structures with different thickness of ZnO and TiO2 is discussed and explained. The study is carried out in order to obtain optimal normalized thickness of the multilayer structure for fabricating acousto-optic tunable filter with high figure of merit (FOM). Based on simulation and study of SAW propagation characteristics like, electromechanical coupling co-efficient, figure of merit and phase velocity, it is inferred that this structure is suitable for the desired application.

AB - In this paper, TiO2/ZnO/SiO2/Si layer structures with different thickness of ZnO and TiO2 is discussed and explained. The study is carried out in order to obtain optimal normalized thickness of the multilayer structure for fabricating acousto-optic tunable filter with high figure of merit (FOM). Based on simulation and study of SAW propagation characteristics like, electromechanical coupling co-efficient, figure of merit and phase velocity, it is inferred that this structure is suitable for the desired application.

UR - https://www.scopus.com/pages/publications/85087438070

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DO - 10.1088/1742-6596/1529/5/052039

M3 - Article

AN - SCOPUS:85087438070

SN - 1742-6588

VL - 1529

JO - Journal of Physics: Conference Series

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M1 - 052039

T2 - 2nd Joint International Conference on Emerging Computing Technology and Sports, JICETS 2019

Y2 - 25 November 2019 through 27 November 2019

ER -

FEM simulation analysis of TiO₂/ZnO/SiO₂/Si multilayer structure for CMOS compatible acousto-optic tunable filter

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