FEM simulation analysis of TiO2/ZnO/SiO2/Si multilayer structure for CMOS compatible acousto-optic tunable filter

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Abstract

In this paper, TiO2/ZnO/SiO2/Si layer structures with different thickness of ZnO and TiO2 is discussed and explained. The study is carried out in order to obtain optimal normalized thickness of the multilayer structure for fabricating acousto-optic tunable filter with high figure of merit (FOM). Based on simulation and study of SAW propagation characteristics like, electromechanical coupling co-efficient, figure of merit and phase velocity, it is inferred that this structure is suitable for the desired application.

Original languageEnglish
Article number052039
JournalJournal of Physics: Conference Series
Volume1529
Issue number5
DOIs
Publication statusPublished - 17 Jun 2020
Externally publishedYes
Event2nd Joint International Conference on Emerging Computing Technology and Sports, JICETS 2019 - Bandung, Indonesia
Duration: 25 Nov 201927 Nov 2019

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