TY - JOUR
T1 - FEM simulation analysis of TiO2/ZnO/SiO2/Si multilayer structure for CMOS compatible acousto-optic tunable filter
AU - Hanif, Mehwish
AU - Jeoti, V.
AU - Aslam, M. Z.
N1 - Publisher Copyright:
© 2020 IOP Publishing Ltd. All rights reserved.
PY - 2020/6/17
Y1 - 2020/6/17
N2 - In this paper, TiO2/ZnO/SiO2/Si layer structures with different thickness of ZnO and TiO2 is discussed and explained. The study is carried out in order to obtain optimal normalized thickness of the multilayer structure for fabricating acousto-optic tunable filter with high figure of merit (FOM). Based on simulation and study of SAW propagation characteristics like, electromechanical coupling co-efficient, figure of merit and phase velocity, it is inferred that this structure is suitable for the desired application.
AB - In this paper, TiO2/ZnO/SiO2/Si layer structures with different thickness of ZnO and TiO2 is discussed and explained. The study is carried out in order to obtain optimal normalized thickness of the multilayer structure for fabricating acousto-optic tunable filter with high figure of merit (FOM). Based on simulation and study of SAW propagation characteristics like, electromechanical coupling co-efficient, figure of merit and phase velocity, it is inferred that this structure is suitable for the desired application.
UR - https://www.scopus.com/pages/publications/85087438070
U2 - 10.1088/1742-6596/1529/5/052039
DO - 10.1088/1742-6596/1529/5/052039
M3 - Article
AN - SCOPUS:85087438070
SN - 1742-6588
VL - 1529
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 5
M1 - 052039
T2 - 2nd Joint International Conference on Emerging Computing Technology and Sports, JICETS 2019
Y2 - 25 November 2019 through 27 November 2019
ER -