Abstract
The concepts of ferroelectrics, microsystems, and nanotechnology are discussed. Ferroelectric materials possess many useful properties which are widely exploited in electronic devices, and are also useful for microsystem devices and nanotechnology. Microsystems Technology (MST) has many things to offer to nanotechnology such as in the field of scanning probe devices integrated onto silicon chips. There are also some aspects of MST devices which could come into the nanotechnology range such as quantum well semiconductor layers.
| Original language | English |
|---|---|
| Pages (from-to) | 39-43 |
| Number of pages | 5 |
| Journal | IEE Colloquium (Digest) |
| Issue number | 140 |
| Publication status | Published - 1 Dec 2000 |
| Externally published | Yes |
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