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Ferroelectrics, microsystems and nanotechnology

  • Roger W. Whatmore

Research output: Contribution to journalArticlepeer-review

Abstract

The concepts of ferroelectrics, microsystems, and nanotechnology are discussed. Ferroelectric materials possess many useful properties which are widely exploited in electronic devices, and are also useful for microsystem devices and nanotechnology. Microsystems Technology (MST) has many things to offer to nanotechnology such as in the field of scanning probe devices integrated onto silicon chips. There are also some aspects of MST devices which could come into the nanotechnology range such as quantum well semiconductor layers.

Original languageEnglish
Pages (from-to)39-43
Number of pages5
JournalIEE Colloquium (Digest)
Issue number140
Publication statusPublished - 1 Dec 2000
Externally publishedYes

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