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Fine control of critical dimension for the fabrication of large bandgap high frequency photonic and phononic crystals

  • J. Cuffe
  • , D. Dudek
  • , N. Kehagias
  • , P. O. Chapuis
  • , V. Reboud
  • , F. Alsina
  • , J. G. McInerney
  • , C. M. Sotomayor Torres

Research output: Contribution to journal › Article › peer-review

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