Fingerprint
Dive into the research topics of 'FinFET doping; material science, metrology, and process modeling studies for optimized device performance'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
FinFET doping; material science, metrology, and process modeling studies for optimized device performance
- R. Duffy
- , M. Shayesteh
Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review