@inbook{9db20d912d2c4067b17e447859d06153,
title = "First Demonstration of Silicon Wafer Inspection Capability using Visible to Short-Wave Infrared CAOS Camera",
abstract = "Highlighted is the multi-stack silicon wafer inspection capability of the visible to ShortWave Infrared (SWIR) high linear dynamic range CAOS camera. SWIR experiments successfully image the location of the copper ring metallization between silicon wafers.",
author = "Riza, \{Nabeel A.\}",
note = "Publisher Copyright: {\textcopyright} 2022 The Author(s); Applied Industrial Optics: Spectroscopy, Imaging and Metrology, AIO 2022 ; Conference date: 25-07-2022 Through 27-07-2022",
year = "2022",
language = "English",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
booktitle = "Applied Industrial Optics",
address = "United States",
}