Flare mitigation strategies in extreme ultraviolet lithography
- Insung Kim
- , Alan Myers
- , Lawrence S.Melvin III
- , Brian Ward
- , Gian Francesco Lorusso
- , Rik Jonckheere
- , Anne Marie Goethals
- , Kurt Ronse
- Samsung
- Intel
- Synopsys Inc.
- Interuniversitair Micro-Elektronica Centrum
Research output: Contribution to journal › Article › peer-review