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GaN-on-Si mm-wave RF devices integrated in a 200mm CMOS Compatible 3-Level Cu BEOL

  • B. Parvais
  • , A. Alian
  • , U. Peralagu
  • , R. Rodriguez
  • , S. Yadav
  • , A. Khaled
  • , R. Y. Elkashlan
  • , V. Putcha
  • , A. Sibaja-Hernandez
  • , M. Zhao
  • , P. Wambacq
  • , N. Collaert
  • , N. Waldron
  • Interuniversitair Micro-Elektronica Centrum
  • Vrije Universiteit Brussel

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

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