Gate stacks

O. Engstrom; I. Z. Mitrovic; S. Hall; P. K. Hurley; Karim Cherkaoui; Ailbe O'Manachain; H. D.B. Gottlob; M C  Lemme

doi:10.1002/9781118621523.ch2

Gate stacks

O. Engstrom
, I. Z. Mitrovic
, S. Hall
, P. K. Hurley
, Karim Cherkaoui
, Ailbe O'Manachain
, H. D.B. Gottlob
, M C Lemme

Chalmers University of Technology
University of Liverpool
AMO GmbH

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

Original language	Undefined/Unknown
Title of host publication	Gate stacks
DOIs	https://doi.org/10.1002/9781118621523.ch2
Publication status	Published - 2013

Publication series

Name	Nanoscale CMOS: Innovative Materials, Modeling and Characterization

Access to Document

10.1002/9781118621523.ch2

Cite this

@inbook{b9c831554c3a4030a66827cc0965b66a,

title = "Gate stacks",

author = "O. Engstrom and Mitrovic, \{I. Z.\} and S. Hall and Hurley, \{P. K.\} and Karim Cherkaoui and Ailbe O'Manachain and Gottlob, \{H. D.B.\} and Lemme, \{M C\}",

year = "2013",

doi = "10.1002/9781118621523.ch2",

language = "Undefined/Unknown",

series = "Nanoscale CMOS: Innovative Materials, Modeling and Characterization",

booktitle = "Gate stacks",

}

TY - CHAP

T1 - Gate stacks

AU - Engstrom, O.

AU - Mitrovic, I. Z.

AU - Hall, S.

AU - Hurley, P. K.

AU - Cherkaoui, Karim

AU - O'Manachain, Ailbe

AU - Gottlob, H. D.B.

AU - Lemme, M C

PY - 2013

Y1 - 2013

U2 - 10.1002/9781118621523.ch2

DO - 10.1002/9781118621523.ch2

M3 - Chapter

T3 - Nanoscale CMOS: Innovative Materials, Modeling and Characterization

BT - Gate stacks

ER -