Giant piezoresistance in silicon-germanium alloys

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Abstract

We use first-principles electronic structure methods to show that the piezoresistive strain gauge factor of single-crystalline bulk n-type silicon-germanium alloys at carefully controlled composition can reach values of G=500, three times larger than that of silicon, the most sensitive such material used in industry today. At cryogenic temperatures of 4 K we find gauge factors of G=135000, 13 times larger than that observed in Si whiskers. The improved piezoresistance is achieved by tuning the scattering of carriers between different (Δ and L) conduction band valleys by controlling the alloy composition and strain configuration.

Original languageEnglish
Article number035205
JournalPhysical Review B - Condensed Matter and Materials Physics
Volume86
Issue number3
DOIs
Publication statusPublished - 9 Jul 2012

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