Groups III and v impurity solubilities in silicon due to laser, flash, and solid-phase-epitaxial-regrowth anneals
- R. Duffy
- , T. Dao
- , Y. Tamminga
- , K. Van Der Tak
- , F. Roozeboom
- , E. Augendre
- Koninklijke Philips N.V.
- Interuniversitair Micro-Elektronica Centrum
Research output: Contribution to journal › Article › peer-review