Abstract
Thin films of cubic In2Se3 have been grown by low-pressure metal-organic chemical vapor deposition (LP-MOCVD) using the novel precursor In(Se2CNMe n-hexyl)3. The precursor was prepared from carbon diselenide and a modified experimental procedure for the synthesis of CSe2 is described. Films were grown on glass and InP(111) between 450 and 500 °C, and characterized by X-ray diffraction and scanning electron microscopy.
| Original language | English |
|---|---|
| Pages (from-to) | 227-229 |
| Number of pages | 3 |
| Journal | Advanced Materials |
| Volume | 9 |
| Issue number | 10 |
| Publication status | Published - 8 Aug 1997 |
| Externally published | Yes |