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Growth stages of sol-gel derived PZT(30/70) on Pt/Ti/SiO
2
as shown by SPM (PFM and topography)
S. Dunn
, Q. Zhang
, R. W. Whatmore
Tyndall Micronano Electronics
Cranfield University
Nanotechnology Group
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2
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Material Science
Actuator
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Ferroelectric Material
100%
Heat Treatment
50%
Microelectromechanical System
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Nucleation
50%
Piezoelectric Property
50%
Piezoelectricity
50%
Silicon
50%
Sol-Gel
100%
Surface Topography
50%
Thick Films
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X-Ray Diffraction
100%
Engineering
Actuator
50%
Atmospheric Aerosol
100%
Contact Mode
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Heat Treatment
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Microelectromechanical System
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Piezoelectric
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Scanning Probe Technique
50%
Silicon Dioxide
100%
Surface Topography
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X Ray Diffraction
100%