Guest editorial ICMTS 2002

Research output: Contribution to journal › Editorial

Original language	English
Pages (from-to)	179-180
Number of pages	2
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	16
Issue number	2
DOIs	https://doi.org/10.1109/TSM.2003.811898
Publication status	Published - May 2003

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@article{a29aea886f824319a53c21242f95cc45,

title = "Guest editorial ICMTS 2002",

author = "Walton, \{Anthony J.\} and Alan Mathewson and McCarthy, \{Kevin G.\}",

year = "2003",

month = may,

doi = "10.1109/TSM.2003.811898",

language = "English",

volume = "16",

pages = "179--180",

journal = "IEEE Transactions on Semiconductor Manufacturing",

issn = "0894-6507",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2",

}

TY - JOUR

T1 - Guest editorial ICMTS 2002

AU - Walton, Anthony J.

AU - Mathewson, Alan

AU - McCarthy, Kevin G.

PY - 2003/5

Y1 - 2003/5

UR - https://www.scopus.com/pages/publications/0037616397

U2 - 10.1109/TSM.2003.811898

DO - 10.1109/TSM.2003.811898

M3 - Editorial

AN - SCOPUS:0037616397

SN - 0894-6507

VL - 16

SP - 179

EP - 180

JO - IEEE Transactions on Semiconductor Manufacturing

JF - IEEE Transactions on Semiconductor Manufacturing

IS - 2

ER -