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Half-cycle atomic layer deposition reaction study using O3 and H2O oxidation of Al2O3 on In 0.53Ga0.47As

  • B. Brennan
  • , M. Milojevic
  • , H. C. Kim
  • , P. K. Hurley
  • , J. Kim
  • , G. Hughes
  • , R. M. Wallace
  • Dublin City University
  • University of Texas at Dallas

Research output: Contribution to journal › Article › peer-review

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