High Aspect Ratio 3-dimensional MIM Capacitors using Atomic Layer Deposition

M Burke; A Blake; V Djara; D O’Connell; IM Povey; K Cherkaoui; S Monaghan; J Scully; R Murphy; PK Hurley; others

High Aspect Ratio 3-dimensional MIM Capacitors using Atomic Layer Deposition

M Burke
, A Blake
, V Djara
, D O’Connell
, IM Povey
, K Cherkaoui
, S Monaghan
, J Scully
, R Murphy
, PK Hurley
, others

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Meeting Abstracts
Publication status	Published - 2009

Cite this

@article{bb405869bcd84be89f0b604b81ee6e33,

title = "High Aspect Ratio 3-dimensional MIM Capacitors using Atomic Layer Deposition",

author = "M Burke and A Blake and V Djara and D O{\textquoteright}Connell and IM Povey and K Cherkaoui and S Monaghan and J Scully and R Murphy and PK Hurley and others",

year = "2009",

language = "Undefined/Unknown",

journal = "Meeting Abstracts",

issn = "1091-8213",

}