High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition

Micheal Burke; Alan Blake; Vladimir Djara; Dan O'Connell; Ian M. Povey; Karim Cherkaoui; Scott Monaghan; Jim Scully; Richard Murphy; Paul K. Hurley; Martyn E. Pemble; Aidan J. Quinn

doi:10.1116/1.4891319

High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition

Micheal Burke
, Alan Blake
, Vladimir Djara
, Dan O'Connell
, Ian M. Povey
, Karim Cherkaoui
, Scott Monaghan
, Jim Scully
, Richard Murphy
, Paul K. Hurley
, Martyn E. Pemble
, Aidan J. Quinn

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOIs	https://doi.org/10.1116/1.4891319
Publication status	Published - 2015

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10.1116/1.4891319

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Burke, M., Blake, A., Djara, V., O'Connell, D., Povey, I. M., Cherkaoui, K., Monaghan, S., Scully, J., Murphy, R., Hurley, P. K., Pemble, M. E., & Quinn, A. J. (2015). High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. https://doi.org/10.1116/1.4891319

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title = "High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition",

author = "Micheal Burke and Alan Blake and Vladimir Djara and Dan O'Connell and Povey, \{Ian M.\} and Karim Cherkaoui and Scott Monaghan and Jim Scully and Richard Murphy and Hurley, \{Paul K.\} and Pemble, \{Martyn E.\} and Quinn, \{Aidan J.\}",

year = "2015",

doi = "10.1116/1.4891319",

language = "Undefined/Unknown",

journal = "Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films",

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TY - JOUR

T1 - High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition

AU - Burke, Micheal

AU - Blake, Alan

AU - Djara, Vladimir

AU - O'Connell, Dan

AU - Povey, Ian M.

AU - Cherkaoui, Karim

AU - Monaghan, Scott

AU - Scully, Jim

AU - Murphy, Richard

AU - Hurley, Paul K.

AU - Pemble, Martyn E.

AU - Quinn, Aidan J.

PY - 2015

Y1 - 2015

UR - https://publons.com/wos-op/publon/9241522/

U2 - 10.1116/1.4891319

DO - 10.1116/1.4891319

M3 - Article

JO - Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

JF - Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

ER -

High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition

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