High aspect ratio iridescent three-dimensional metal--insulator--metal capacitors using atomic layer deposition

Micheal Burke; Alan Blake; Vladimir Djara; Dan O'Connell; Ian M Povey; Karim Cherkaoui; Scott Monaghan; Jim Scully; Richard Murphy; Paul K Hurley; others

High aspect ratio iridescent three-dimensional metal--insulator--metal capacitors using atomic layer deposition

Micheal Burke
, Alan Blake
, Vladimir Djara
, Dan O'Connell
, Ian M Povey
, Karim Cherkaoui
, Scott Monaghan
, Jim Scully
, Richard Murphy
, Paul K Hurley
, others

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Vacuum Science & Technology A
Publication status	Published - 2015

Cite this

@article{ce9ab66121ef481dbb8ef40226a629d4,

title = "High aspect ratio iridescent three-dimensional metal--insulator--metal capacitors using atomic layer deposition",

author = "Micheal Burke and Alan Blake and Vladimir Djara and Dan O'Connell and Povey, \{Ian M\} and Karim Cherkaoui and Scott Monaghan and Jim Scully and Richard Murphy and Hurley, \{Paul K\} and others",

year = "2015",

language = "Undefined/Unknown",

journal = "Journal of Vacuum Science \& Technology A",

}

TY - JOUR

T1 - High aspect ratio iridescent three-dimensional metal--insulator--metal capacitors using atomic layer deposition

AU - Burke, Micheal

AU - Blake, Alan

AU - Djara, Vladimir

AU - O'Connell, Dan

AU - Povey, Ian M

AU - Cherkaoui, Karim

AU - Monaghan, Scott

AU - Scully, Jim

AU - Murphy, Richard

AU - Hurley, Paul K

AU - others,

PY - 2015

Y1 - 2015

M3 - Article

JO - Journal of Vacuum Science & Technology A

JF - Journal of Vacuum Science & Technology A

ER -