High efficiency on si-integrated microtransformers for isolated power conversion applications

Research output: Contribution to journalArticlepeer-review

Abstract

This paper details the design, fabrication, and characterization of silicon-integrated microtransformers for isolated bias supplies. Racetrack-shaped microtransformers were designed and fabricated using the advanced double-layer metal (DLM) microfabrication process. The DLM devices have high inductance density of more than 80 nH/mm2 with an efficiency of approximately 78.2% at 20 MHz at 0.5-W output. This is the highest efficiency and power density reported for an integrated transformer in the literature. The inductance drop is less than 20% with a bias current of 0.35 A with up to 6-kV dc breakdown voltage achieved.

Original languageEnglish
Article numberA18
Pages (from-to)5746-5754
Number of pages9
JournalIEEE Transactions on Power Electronics
Volume30
Issue number10
DOIs
Publication statusPublished - 1 Oct 2015

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 9 - Industry, Innovation, and Infrastructure
    SDG 9 Industry, Innovation, and Infrastructure

Keywords

  • integrated circuits
  • isolation technology
  • magnetic cores
  • Magnetic devices
  • power conversion
  • power transformers
  • switched-mode power supply

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