High efficiency Si integrated micro-transformers using stacked copper windings for power conversion applications

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Abstract

This paper details the design, fabrication, and characterization of silicon integrated micro-transformers. Two types of race-track shaped micro-transformers, single copper winding or single layer metal (SLM) and double copper winding or double layer metal (DLM) were designed and fabricated using standard CMOS processing. The DLM devices have higher inductance density than SLM devices realized within similar footprint area. The design study showed that the efficiency of micro-transformers increased from 37% for SLM designs to over 75% for DLM transformers at 20 MHz.

Original languageEnglish
Title of host publicationAPEC 2012 - 27th Annual IEEE Applied Power Electronics Conference and Exposition
Pages411-416
Number of pages6
DOIs
Publication statusPublished - 2012
Event27th Annual IEEE Applied Power Electronics Conference and Exposition, APEC 2012 - Orlando, FL, United States
Duration: 5 Feb 20129 Feb 2012

Publication series

NameConference Proceedings - IEEE Applied Power Electronics Conference and Exposition - APEC

Conference

Conference27th Annual IEEE Applied Power Electronics Conference and Exposition, APEC 2012
Country/TerritoryUnited States
CityOrlando, FL
Period5/02/129/02/12

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