High frequency thin film acoustic ferroelectric resonators

Paul Kirby; Qing Xin Su; Eiju Komuro; Masaaki Imura; Qi Zhang; Roger Whatmore

High frequency thin film acoustic ferroelectric resonators

Paul Kirby
, Qing Xin Su
, Eiju Komuro
, Masaaki Imura
, Qi Zhang
, Roger Whatmore

Research output: Contribution to journal › Article › peer-review

Abstract

Both ZnO and PZT Thin Film Bulk Acoustic Resonator filters were fabricated, tested and modeled in this study. The development of an accurate Mason model allows the effect of particular parasitic components on the microwave s-parameters in the region of the series and parallel resonances to be identified. The parasitic components that limit the performance of our ZnO and PbZr_0.3T_0.7O₃ Thin Film Bulk Acoustic Resonator filters are analysed. From an analysis of PbZr_0.3Ti_0.7O₃ Thin Film Bulk Acoustic Resonator measurements values for the longitudinal acoustic velocity and electromechanical coupling coefficient can be derived. Measured PbZ_0.3T_0.7O₃ Thin Film Bulk Acoustic Resonator filter responses confirm that the larger electromechanical coupling coefficients in this material compared to ZnO give wider filter band-widths.

Original language	English
Pages (from-to)	XCXXX-XCXXXI
Journal	Materials Research Society Symposium - Proceedings
Volume	655
Publication status	Published - 2001
Externally published	Yes

Cite this

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title = "High frequency thin film acoustic ferroelectric resonators",

abstract = "Both ZnO and PZT Thin Film Bulk Acoustic Resonator filters were fabricated, tested and modeled in this study. The development of an accurate Mason model allows the effect of particular parasitic components on the microwave s-parameters in the region of the series and parallel resonances to be identified. The parasitic components that limit the performance of our ZnO and PbZr0.3T0.7O3 Thin Film Bulk Acoustic Resonator filters are analysed. From an analysis of PbZr0.3Ti0.7O3 Thin Film Bulk Acoustic Resonator measurements values for the longitudinal acoustic velocity and electromechanical coupling coefficient can be derived. Measured PbZ0.3T0.7O3 Thin Film Bulk Acoustic Resonator filter responses confirm that the larger electromechanical coupling coefficients in this material compared to ZnO give wider filter band-widths.",

author = "Paul Kirby and Su, \{Qing Xin\} and Eiju Komuro and Masaaki Imura and Qi Zhang and Roger Whatmore",

year = "2001",

language = "English",

volume = "655",

pages = "XCXXX--XCXXXI",

journal = "Materials Research Society Symposium - Proceedings",

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T1 - High frequency thin film acoustic ferroelectric resonators

AU - Kirby, Paul

AU - Su, Qing Xin

AU - Komuro, Eiju

AU - Imura, Masaaki

AU - Zhang, Qi

AU - Whatmore, Roger

PY - 2001

Y1 - 2001

N2 - Both ZnO and PZT Thin Film Bulk Acoustic Resonator filters were fabricated, tested and modeled in this study. The development of an accurate Mason model allows the effect of particular parasitic components on the microwave s-parameters in the region of the series and parallel resonances to be identified. The parasitic components that limit the performance of our ZnO and PbZr0.3T0.7O3 Thin Film Bulk Acoustic Resonator filters are analysed. From an analysis of PbZr0.3Ti0.7O3 Thin Film Bulk Acoustic Resonator measurements values for the longitudinal acoustic velocity and electromechanical coupling coefficient can be derived. Measured PbZ0.3T0.7O3 Thin Film Bulk Acoustic Resonator filter responses confirm that the larger electromechanical coupling coefficients in this material compared to ZnO give wider filter band-widths.

AB - Both ZnO and PZT Thin Film Bulk Acoustic Resonator filters were fabricated, tested and modeled in this study. The development of an accurate Mason model allows the effect of particular parasitic components on the microwave s-parameters in the region of the series and parallel resonances to be identified. The parasitic components that limit the performance of our ZnO and PbZr0.3T0.7O3 Thin Film Bulk Acoustic Resonator filters are analysed. From an analysis of PbZr0.3Ti0.7O3 Thin Film Bulk Acoustic Resonator measurements values for the longitudinal acoustic velocity and electromechanical coupling coefficient can be derived. Measured PbZ0.3T0.7O3 Thin Film Bulk Acoustic Resonator filter responses confirm that the larger electromechanical coupling coefficients in this material compared to ZnO give wider filter band-widths.

UR - https://www.scopus.com/pages/publications/24144470099

M3 - Article

AN - SCOPUS:24144470099

SN - 0272-9172

VL - 655

SP - XCXXX-XCXXXI

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

ER -

High frequency thin film acoustic ferroelectric resonators

Abstract

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