High frequency thin film ferroelectric acoustic resonators

  • Paul Kirby
  • , Qing Xin Su
  • , Eiju Komuro
  • , Masaaki Imura
  • , Qi Zhang
  • , Roger Whatmore

Research output: Contribution to journalArticlepeer-review

Abstract

The features and benefits of thin films bulk acoustic resonators (FBAR) are discussed. The FBAR are best suited for future mobile communication system as they are compact, have low-loss and are largely compatible with the existing high frequency Si/GaAs IC processing. A FBAR is a resonant piezoelectric device similar to the quartz resonators, which consists of piezoelectric layer sandwich between two electrodes. Larger 3 dB bandwidths can be obtained from PZT FBAR filters due to the larger electromechanical coupling coefficient for PZT.

Original languageEnglish
Pages (from-to)5-7
Number of pages3
JournalIEE Colloquium (Digest)
Issue number117
Publication statusPublished - 28 Nov 2000
Externally publishedYes

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