Hybrid integration of light emitting diodes with photonic integrated circuits on silicon

Dana Cristea; M. Modreanu; Mira Caldararu; Ileana Cernica; V. Avramescu

Hybrid integration of light emitting diodes with photonic integrated circuits on silicon

Dana Cristea
, M. Modreanu
, Mira Caldararu
, Ileana Cernica
, V. Avramescu

National Institute for Research and Development in Microtechnologies Romania

Research output: Contribution to conference › Paper › peer-review

Abstract

This paper presents the experiments we performed for hybrid integration of LED's with silicon photonic integration circuits. LED's were face down mounted in a silicon cavity. The edge-emitted light is coupled in SiON waveguides. The silicon cavity was obtained by anisotropic etching of the silicon substrate. The integration of all the components on one chip increases the sensor reliability and reduces the size, weight and cost.

Original language	English
Pages	523-526
Number of pages	4
Publication status	Published - 1998
Externally published	Yes
Event	Proceedings of the 1998 International Semiconductor Conference, CAS'98. Part 2 (of 2) - Sinaia, Romania Duration: 6 Oct 1998 → 10 Oct 1998

Conference

Conference	Proceedings of the 1998 International Semiconductor Conference, CAS'98. Part 2 (of 2)
City	Sinaia, Romania
Period	6/10/98 → 10/10/98

Cite this

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title = "Hybrid integration of light emitting diodes with photonic integrated circuits on silicon",

abstract = "This paper presents the experiments we performed for hybrid integration of LED's with silicon photonic integration circuits. LED's were face down mounted in a silicon cavity. The edge-emitted light is coupled in SiON waveguides. The silicon cavity was obtained by anisotropic etching of the silicon substrate. The integration of all the components on one chip increases the sensor reliability and reduces the size, weight and cost.",

author = "Dana Cristea and M. Modreanu and Mira Caldararu and Ileana Cernica and V. Avramescu",

year = "1998",

language = "English",

pages = "523--526",

note = "Proceedings of the 1998 International Semiconductor Conference, CAS'98. Part 2 (of 2) ; Conference date: 06-10-1998 Through 10-10-1998",

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TY - CONF

T1 - Hybrid integration of light emitting diodes with photonic integrated circuits on silicon

AU - Cristea, Dana

AU - Modreanu, M.

AU - Caldararu, Mira

AU - Cernica, Ileana

AU - Avramescu, V.

PY - 1998

Y1 - 1998

N2 - This paper presents the experiments we performed for hybrid integration of LED's with silicon photonic integration circuits. LED's were face down mounted in a silicon cavity. The edge-emitted light is coupled in SiON waveguides. The silicon cavity was obtained by anisotropic etching of the silicon substrate. The integration of all the components on one chip increases the sensor reliability and reduces the size, weight and cost.

AB - This paper presents the experiments we performed for hybrid integration of LED's with silicon photonic integration circuits. LED's were face down mounted in a silicon cavity. The edge-emitted light is coupled in SiON waveguides. The silicon cavity was obtained by anisotropic etching of the silicon substrate. The integration of all the components on one chip increases the sensor reliability and reduces the size, weight and cost.

UR - https://www.scopus.com/pages/publications/0032310098

M3 - Paper

AN - SCOPUS:0032310098

SP - 523

EP - 526

T2 - Proceedings of the 1998 International Semiconductor Conference, CAS'98. Part 2 (of 2)

Y2 - 6 October 1998 through 10 October 1998

ER -

Hybrid integration of light emitting diodes with photonic integrated circuits on silicon

Abstract

Conference

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