Impact of Device Geometry, Physical Doping and Electrostatic Doping on the Frequency CV-dispersion of TFT Devices with IWO Channels

  • Andrea Palmieri
  • , Karim Cherkaoui
  • , Khandker Akif Aabrar
  • , Yaoqiao Hu
  • , Luca Larcher
  • , Kyeongjae Cho
  • , Suman Datta
  • , Paul Hurley
  • , Milan Pesic

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Abstract

Using combined experimental and modeling techniques, we analyze nonidealities in the oxide semiconductor channel devices. We focus on the IWO-based TFTs (fabricated in BEOL) with excellent switching properties and deconvolute frequency dispersion of CV/GV, observed under different measurement condition and attribute it to the non-idealities in the S/D extension and electrostatic doping impacting the TFT's response. Finally, we show importance of physical doping in suppression of the observed dispersion.

Original languageEnglish
Title of host publication7th IEEE Electron Devices Technology and Manufacturing Conference
Subtitle of host publicationStrengthen the Global Semiconductor Research Collaboration After the Covid-19 Pandemic, EDTM 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350332520
DOIs
Publication statusPublished - 2023
Event7th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2023 - Seoul, Korea, Republic of
Duration: 7 Mar 202310 Mar 2023

Publication series

Name7th IEEE Electron Devices Technology and Manufacturing Conference: Strengthen the Global Semiconductor Research Collaboration After the Covid-19 Pandemic, EDTM 2023

Conference

Conference7th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2023
Country/TerritoryKorea, Republic of
CitySeoul
Period7/03/2310/03/23

Keywords

  • IWO
  • logic
  • Scaling
  • split-CV
  • TFT

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