Impact of the polysilicon doping level on the properties of the silicon/oxide interface in polysilicon/oxide/silicon capacitor structures

  • C. Leveugle
  • , P. K. Hurley
  • , A. Mathewson
  • , S. Moran
  • , E. Sheehan
  • , A. Kalnitsky
  • , A. Lepert
  • , I. Beinglass
  • , M. Venkatesan

Research output: Contribution to journal › Article › peer-review

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