| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | ECS Meeting Abstracts |
| Publication status | Published - 2011 |
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Improved Capacitance-Voltage Characteristics of MOS Capacitors on GaAs Incorporating a PECVD Deposited Si3N4 Dielectric Layer
Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review