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In Situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

  • Nathan J. O'Brien
  • , Polla Rouf
  • , Rouzbeh Samii
  • , Karl Rönnby
  • , Sydney C. Buttera
  • , Chih Wei Hsu
  • , Ivan G. Ivanov
  • , Vadim Kessler
  • , Lars Ojamäe
  • , Henrik Pedersen

Research output: Contribution to journal › Article › peer-review

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