In situ FTIR experimental results in the silylation of low-k films with hexamethyldisilazane dissolved in supercritical carbon dioxide
- Eduardo Vyhmeister
- , Lorenzo Reyes-Bozo
- , Héctor Valdés-González
- , José Luis Salazar
- , Anthony Muscat
- , L. Antonio Estévez
- , David Suleiman
- University of Arizona
- University of Puerto Rico at Mayagez
- Universidad de Santiago de Chile
- Universidad Andrés Bello
Research output: Contribution to journal › Article › peer-review