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In situ hard mask materials: A new methodology for creation of vertical silicon nanopillar and nanowire arrays

  • Tandra Ghoshal
  • , Ramsankar Senthamaraikannan
  • , Matthew T. Shaw
  • , Justin D. Holmes
  • , Michael A. Morris
  • Trinity College Dublin
  • Intel

Research output: Contribution to journal › Article › peer-review

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