TY - GEN
T1 - Influence of annealing temperature on ZnO thin films prepared by single and multi-step sol-gel processes
AU - Koh, Lee Huat Kelly
AU - O'Brien, Shane
AU - Lovera, Pierre
AU - Redmond, Gareth
AU - Crean, Gabriel M.
PY - 2007
Y1 - 2007
N2 - ZnO thin films were prepared on borosilicate glass from both single- and multi- step coating deposition of a sol-gel prepared with anhydrous zinc acetate [Zn(C2H3O2)2], monoethanolamine [H2NC2H2OH ] and isopropanol. ZnO films prepared over a range of zinc acetate concentrations, for a fixed annealing temperature, showed that sol-gels prepared with a 0.3M zinc acetate concentration resulted in the formation of films with the greatest degree of c-axis orientation. In this study, a detailed investigation of the influence of process annealing temperature over the range 450 - 550°C on film properties around this 0.3M zinc concentration set point is presented. X-ray analysis showed that all single-step deposition thin films were preferentially orientated along the [002] c-axis direction of the crystal. In contrast, only the multi-layer film annealed at 550°C showed similar preferential orientation.
AB - ZnO thin films were prepared on borosilicate glass from both single- and multi- step coating deposition of a sol-gel prepared with anhydrous zinc acetate [Zn(C2H3O2)2], monoethanolamine [H2NC2H2OH ] and isopropanol. ZnO films prepared over a range of zinc acetate concentrations, for a fixed annealing temperature, showed that sol-gels prepared with a 0.3M zinc acetate concentration resulted in the formation of films with the greatest degree of c-axis orientation. In this study, a detailed investigation of the influence of process annealing temperature over the range 450 - 550°C on film properties around this 0.3M zinc concentration set point is presented. X-ray analysis showed that all single-step deposition thin films were preferentially orientated along the [002] c-axis direction of the crystal. In contrast, only the multi-layer film annealed at 550°C showed similar preferential orientation.
UR - https://www.scopus.com/pages/publications/34250795701
M3 - Conference proceeding
AN - SCOPUS:34250795701
SN - 0762313951
SN - 9780762313952
T3 - Materials Research Society Symposium Proceedings
SP - 373
EP - 378
BT - Zinc Oxide and Related Materials
T2 - 2006 MRS Fall Meeting
Y2 - 27 November 2006 through 30 November 2006
ER -