Influence of Carbon Nanotubes on the Electrodeposition of Copper Interconnects

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Keywords

@article{2aee9d2a3641425ba45eb84543928a5d,

title = "Influence of Carbon Nanotubes on the Electrodeposition of Copper Interconnects",

keywords = "Copper, Carbon nanotube, Materials science, Carbon fibers, Nanotechnology, Metallurgy, Composite material, Composite number",

author = "James Rohan",

year = "2009",

doi = "10.1149/ma2009-02/26/2164",

language = "English",

journal = "Meeting Abstracts",

issn = "1091-8213",

}

TY - JOUR

T1 - Influence of Carbon Nanotubes on the Electrodeposition of Copper Interconnects

AU - Rohan, James

PY - 2009

Y1 - 2009

KW - Copper

KW - Carbon nanotube

KW - Materials science

KW - Carbon fibers

KW - Nanotechnology

KW - Metallurgy

KW - Composite material

KW - Composite number

U2 - 10.1149/ma2009-02/26/2164

DO - 10.1149/ma2009-02/26/2164

M3 - Article

SN - 1091-8213

JO - Meeting Abstracts

JF - Meeting Abstracts

ER -