Influence of free radical surface activation on Si/SiC heterogeneous integration by direct wafer bonding

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

Original language	Undefined/Unknown
Title of host publication	2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (ULIS)
Publication status	Published - 2017

Cite this

@inproceedings{86c776e0667446218721a6edb1d26180,

title = "Influence of free radical surface activation on Si/SiC heterogeneous integration by direct wafer bonding",

author = "Ailbe O'Manachain",

year = "2017",

language = "Undefined/Unknown",

booktitle = "2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (ULIS)",

}