Influence of probing configuration and data set size for bipolar junction capacitance determination

D. MacSweeney; K. G. McCarthy; L. Floyd; A. Mathewson; P. Hurley; J. A. Power; S. C. Kelly

Influence of probing configuration and data set size for bipolar junction capacitance determination

D. MacSweeney
, K. G. McCarthy
, L. Floyd
, A. Mathewson
, P. Hurley
, J. A. Power
, S. C. Kelly

Research output: Contribution to conference › Paper › peer-review

Abstract

In this paper, the on-wafer measurement of Junction Depletion Capacitance is examined. This work provides an in-depth discussion of possible probing configurations which can be used. It outlines a method to consistently measure the junction capacitances accurately. The results from this method compare favourably with those extracted using S-parameter measurements. Additionally a method is formulated to determine the minimum number of data points required to maintain extraction accuracy.

Original language	English
Pages	127-132
Number of pages	6
Publication status	Published - 2002
Event	Proceedings of The 2002 International Conference on Microelectronic Test Structures - Cork, Ireland Duration: 8 Apr 2002 → 11 Apr 2002

Conference

Conference	Proceedings of The 2002 International Conference on Microelectronic Test Structures
Country/Territory	Ireland
City	Cork
Period	8/04/02 → 11/04/02

Cite this

@conference{1085cb8f3459412db9fdec1846915681,

title = "Influence of probing configuration and data set size for bipolar junction capacitance determination",

abstract = "In this paper, the on-wafer measurement of Junction Depletion Capacitance is examined. This work provides an in-depth discussion of possible probing configurations which can be used. It outlines a method to consistently measure the junction capacitances accurately. The results from this method compare favourably with those extracted using S-parameter measurements. Additionally a method is formulated to determine the minimum number of data points required to maintain extraction accuracy.",

author = "D. MacSweeney and McCarthy, \{K. G.\} and L. Floyd and A. Mathewson and P. Hurley and Power, \{J. A.\} and Kelly, \{S. C.\}",

year = "2002",

language = "English",

pages = "127--132",

note = "Proceedings of The 2002 International Conference on Microelectronic Test Structures ; Conference date: 08-04-2002 Through 11-04-2002",

}

TY - CONF

T1 - Influence of probing configuration and data set size for bipolar junction capacitance determination

AU - MacSweeney, D.

AU - McCarthy, K. G.

AU - Floyd, L.

AU - Mathewson, A.

AU - Hurley, P.

AU - Power, J. A.

AU - Kelly, S. C.

PY - 2002

Y1 - 2002

N2 - In this paper, the on-wafer measurement of Junction Depletion Capacitance is examined. This work provides an in-depth discussion of possible probing configurations which can be used. It outlines a method to consistently measure the junction capacitances accurately. The results from this method compare favourably with those extracted using S-parameter measurements. Additionally a method is formulated to determine the minimum number of data points required to maintain extraction accuracy.

AB - In this paper, the on-wafer measurement of Junction Depletion Capacitance is examined. This work provides an in-depth discussion of possible probing configurations which can be used. It outlines a method to consistently measure the junction capacitances accurately. The results from this method compare favourably with those extracted using S-parameter measurements. Additionally a method is formulated to determine the minimum number of data points required to maintain extraction accuracy.

UR - https://www.scopus.com/pages/publications/0037819295

M3 - Paper

AN - SCOPUS:0037819295

SP - 127

EP - 132

T2 - Proceedings of The 2002 International Conference on Microelectronic Test Structures

Y2 - 8 April 2002 through 11 April 2002

ER -

Influence of probing configuration and data set size for bipolar junction capacitance determination

Abstract

Conference

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