Infrared and near-infrared spectroscopic probing of atomic layer deposition processes

Physics

• Near Infrared 100%
• Atomic Layer Epitaxy 100%
• Vapor Phase 75%
• Semiconductor Laser 50%
• Methane 50%
• FTIR Spectroscopy 50%
• Laser Spectroscopy 50%
• Reactor Dynamics 25%

Material Science

• Semiconductor Laser 100%
• Fourier Transform Infrared Spectroscopy 100%
• Laser Spectroscopy 100%
• Aluminum Oxide 50%

Chemical Engineering

• Atomic Layer Deposition 100%
• Fourier Transform 50%
• Methane 50%